1.

Conference Proceedings

Conference Proceedings
Leistner, T ; Frey, L. ; Bauer, A. ; Schmidt, C. ; Lehmbacher, K. ; Haerler, P. ; Herrmann, W. ; Mesic, E. ; Kaufmann, P. ; Kudinski, L. ; Durst, F.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.160-167,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Technical Paper

Technical Paper
Weber, C. ; Herrmann, W. ; Stadtmann, J.
Pub. info.: 1998 SAE International Congress and Exposition : technical paper.  pp.137-145,  1998.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1998