Leistner, T ; Frey, L. ; Bauer, A. ; Schmidt, C. ; Lehmbacher, K. ; Haerler, P. ; Herrmann, W. ; Mesic, E. ; Kaufmann, P. ; Kudinski, L. ; Durst, F.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.160-167, 2001. Pennington, N.J.. Electrochemical Society