1.

Conference Proceedings
Conference Proceedings
1. 'Volcano' Reactions and Step Coverage in Oxide Vias Between Tungsten CVD and Bias SputteredTiN/Ti Films
Herner, S.B. ; Tanaka, Y. ; Zhang, H. ; Littau, K.A. ; Ghanayem, S.G.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.22-33,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
2.

Conference Proceedings
Conference Proceedings
2. SILICIDE AS DOPANT SOURCE: ULTRASHALLOW N AND P JUNCTIONS IN SILICON
Herner, S.B. ; Gossmann, H.-J. ; Tung, R.T. ; Gila, B.P.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1224-1231,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. BORON-ENHANCED-DIFFUSION OF BORON FROM ULTRA- LOW-ENERGY BORON IMPLANTATION
Agarwal, A. ; Eaglesham, D.J. ; Gossmann, H.-J. ; Pelaz, L. ; Herner, S.B. ; Jacobson, D.C. ; Haynes, T.E. ; Erokhin, Yu E.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1232-1240,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
4.

Conference Proceedings
Conference Proceedings
4. Effect of ohmic contacts on polysilicon memory Effect
Herner, S.B. ; Jahn, C. ; Kidwell, D.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.169-174,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
5.

Conference Proceedings
Conference Proceedings
5. EFFECT OF OXYGEN ON POINT DEFECT INJECTION DURING SILICIDATION OF TITANIUM
Chen, J. ; Robinson, H.G. ; Herner, S.B. ; Jones, K.S.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1029-1040,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10