1.

Conference Proceedings
Conference Proceedings
1. Beta test performance of the Leica LWM 250 UV CD measurement tool
Henderson,R.K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.760-783,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings
Conference Proceedings
2. Measurement error revisited
Henderson,R.K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.703-727,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Carbon stain effects from SEM exposure
Grantz,J. ; Henderson,R.K. ; Wood,J.L.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.668-676,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings
Conference Proceedings
4. Design,reticle,and wafer OPC manufacturability for the 0.18-ｦﾌm lithography generation
Lucas,K.D. ; McCallum,M. ; Falch,B.J. ; Wood,J.L. ; Kalk,F.D. ; Henderson,R.K. ; Russell,D.R.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.118-129,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
5.

Conference Proceedings
Conference Proceedings
5. MoSi PSM defect inspection and sensitivity analysis
Chen,J.X. ; Henderson,R.K. ; Kalk,F.D.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.121-131,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546