Blank Cover Image

Effect of Extended Defects on the Enhanced Diffusion of Phosphorus Implanted Silicon

Author(s):
Keys, P. H.
Li, J. H.
Heitman, E.
Packan, P. A.
Law, M. E.
Jones, K. S.
1 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
568
Pub. Year:
1999
Page(from):
199
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
Language:
English
Call no.:
M23500/568
Type:
Conference Proceedings

Similar Items:

Li, J., Keys, P., Chen, J., Law, M. E., Jones, K. S., Jasper, C.

MRS - Materials Research Society

Adam, L. S., Law, M. E., Dokumaci, O., Haddara, Y., Murthy, C., Park, H., Hegde, S., Chidambarrao, D., Mollis, S., …

MRS - Materials Research Society

Keys, P. H., Brindos, R., Krishnamoorthy, V., Puga-Lambers, M., Jones, K. S., Law, Mark E.

Materials Research Society

Krishnamoorthy, V., Venables, D., Moeller, K., Jones, K. S., Jackson, J.

MRS - Materials Research Society

Liu, J., Jones, K. S., Downey, D. F., Mehta, S.

MRS - Materials Research Society

Li, Jing-Hong, Jones, Kevin S.

MRS - Materials Research Society

4 Conference Proceedings Modeling of Extended Defects in Silicon

Law, M. E., Jones, K. S., Earles, S. K., Lilak, A. D., Xu, J-W.

MRS - Materials Research Society

Brindos, R., Jones, K.S., Law, M.E

Materials Research Society

5 Conference Proceedings Modeling of Extended Defects in Silicon

Law, M. E., Jones, K. S., Earles, S. K., Lilak, A. D., Xu, J-W.

MRS - Materials Research Society

Venables, D., Krishnamoorthy, V., Gossmann, H-J., Lilak, A., Jones, K. S., Jacobson, D. C.

MRS - Materials Research Society

Jones, K. S., Robinson, H. G., Haynes, T. E., Deal, M. D., Lee, C. C., Allen, E. L.

MRS - Materials Research Society

Cowern, N.E.B., Mannino, G., Roozeboom, F., Stalk, P.A., Huizing, H.G.A., van Berkum, J.G.M, Toan, N.N., Woerlee, P.H., …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12