1.

Conference Proceedings
Conference Proceedings
1. Device and lithography contextual mask rule generation
Ham, Y. M. ; Dillon, B. ; Progler, C. ; Goldammer, K. ; Jin, Z. ; Green, G. ; Mackay, R. S. ; Divecha, H. ; Boksha, V. ; Martin, P. ; Heins, M. ; Zhang, Y. ; Davis, K. ; Marutyan, R. ; Martirosyan, K. ; Bakarian, S.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.319-330,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Building an infrastructure for parametric yield analysis: concept and implementation of a DFM platform(Invited Paper)
Gookassian, J. ; Pack, B. ; Heins, M. ; Garcia, J. ; Divecha, H. ; Gordon, B. ; Frazier, D. ; White, D. ; Lachinyan, G. ; Dillon, B. ; Suzor, C. ; Adamov, A. ; Min, K. -Y. ; Bakarian, S. ; Marutyan, R. ; Boksha, V.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.208-218,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
3.

Conference Proceedings
Conference Proceedings
3. Design process optimization, virtual prototyping of manufacturing, and foundry-portable DFM(Invited Paper)
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.21-38,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
4.

Conference Proceedings
Conference Proceedings
4. Mask design rules (45 nm): time for standardization [5992-13]
Mason, M. ; Progler, C. J. ; Martin, P. ; Ham, Y. -M. ; Dillon, B. ; Pack, R. ; Heins, M. ; Gookassian, J. ; Garcia, J. ; Boksha, V.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992