1.

Conference Proceedings
Conference Proceedings
1. Failure analysis of worn surface-micromachined microengines
Walraven,J.A. ; Headley,T.J. ; Campbell,A.N. ; Tanner,D.M.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.30-39,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
2.

Conference Proceedings
Conference Proceedings
2. Comparison of electrical CD measurements and cross-section lattice-plane counts of submicrometer features replicated in(100)silicon-on-insulator material
Cresswell,M.W. ; Bonevich,J.E. ; Headley,T.J. ; Allen,R.A. ; Giannuzzi,L.A. ; Everist,S.C. ; Ghoshtagore,R.N. ; Shea,P.J.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.74-83,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings
Conference Proceedings
3. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180