Zhang, G. ; DeMoor, S. ; Jessen, S. ; He, Q. ; Yan, W. ; Chevacharoenkul, S. ; Vellanki, V. ; Reynolds, P. ; Ganeshan, J. ; Hauschild, J. ; Pieters, M.
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Optical Microlithography XIX. pp.61540N-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems. pp.617432-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Xiao, P. ; He, N. ; Liu, Z. ; He, Q. ; Xu, J ; Lu, Z.
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Micromachining and Microfabrication Process Technology and Devices. pp.401-405, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA. pp.97-108, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lasers in material processing and manufacturing : 16-18 October 2002, Shanghai, China. pp.234-240, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Astronomical structures and mechanisms technology : 21-22 June 2004, Glasgow, Scotland, United Kingdom. pp.670-676, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Ecosystems Dynamics, Ecosystem-Society Interactions, and Remote Sensing Applications for Semi-Arid and Arid Land. Part One pp.276-284, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering