1.

Conference Proceedings
Conference Proceedings
1. Spectroscopic ellipsometric scatterometry: sources of errors in critical dimension control
Hazart, J. ; Grand, G. ; Thony, P. ; Herisson, D. ; Garcia, S. ; Lartigue, O.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.9-20,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
2.

Conference Proceedings
Conference Proceedings
2. A new analysis strategy for CD metrology using rapid photo goniometry method
Petit, J. ; Barritault, P. ; Hazart, J. ; Chaton, P. ; Boher, P. ; Luet, M. ; Leroux, T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.210-221,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
3.

Conference Proceedings
Conference Proceedings
3. 3D features analysis using spectroscopic scatterometry
Quintanilha, R. ; Thony, P. ; Henry, D. ; Hazart, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.456-467,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Innovative rapid photogoniometry method for CD metrology
Boher, P. ; Luet, M. ; Leroux, T. ; Petit, J. ; Barritault, P. ; Hazart, J. ; Chaton, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1302-1313,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
5.

Conference Proceedings
Conference Proceedings
5. Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis [5858-12]
Quintanilha, R. ; Hazart, J. ; Thony, P. ; Henry, D.
Pub. info.: Nano- and Micro-Metrology.  pp.58580C-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5858