Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.386-395, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Device and Multilevel Interconnection Technology II. pp.148-163, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering