1.

Conference Proceedings

Conference Proceedings
Tian,H. ; Perera,A. ; O'Meara,D. ; De,H. ; Subramanian,C.K. ; Rehmann,P. ; Hayden,J.D. ; Herr,N.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.386-395,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings

Conference Proceedings
Hayden,J.D. ; McNelly,T.F. ; Perera,A.H. ; Pfiester,J.R. ; Subramanian,C.K. ; Thompson,M.A.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.148-163,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875