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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.143-152, 1997. Pennington, NJ. Electrochemical Society
Watanabe, R. ; Ichiki, K. ; Hayama, T. ; Kawasaki, A.
Pub. info.:
Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998. pp.19-24, 1999. Uetikon-Zuerich, Switzerland. Trans Tech Publications