1.

Conference Proceedings
Conference Proceedings
1. STUDIES OF SiH2Cl2/H2 GAS PHASE CHEMISTRY FOR SELECTIVE THIN FILM GROWTH OF CRYSTALLINE SILICON, c-Si, USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Theil, J.A. ; Lucovsky, G. ; Hattangady, S.V. ; Fountain, G.G. ; Markunas, R.J.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.601-612,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. LOW TEMPERATURE IN SITU CLEANING OF Si(100) SURFACES AND TRANSMISSION ELECTRON MICROSCOPY OF SUBSEQUENT GROWTH OF EPITAXIAL GERMANIUM
Rudder, R.A. ; Hattangady, S.V. ; Posthill, J.B. ; Markunas, R.J.
Pub. info.: Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.529-534,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 116
3.

Conference Proceedings
Conference Proceedings
3. MICROSTRUCTURAL AND OPTICAL CHARACTERIZATION OF GaN FILMS GROWN BY PECVD ON (0001) SAPPHIRE SUBSTRATES
Humphreys, T.P. ; Sukow, C.A. ; Nemanich, R.J. ; Posthill, J.B. ; Rudder, R.A. ; Hattangady, S.V. ; Markunas, R.J.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.531-536,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
4.

Conference Proceedings
Conference Proceedings
4. LOW TEMPERATURE CLEANING OF Ge AND GaAs SURFACES USING HYDROGEN DISSOCIATED WITH A REMOTE NOBLE-GAS DISCHARGE
Hattangady, S.V. ; Rudder, R.A. ; Mantini, M.J. ; Fountain, G.G. ; Posthill, J.B. ; Markunas, R.J.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.221-226,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
5.

Conference Proceedings
Conference Proceedings
5. *DEVELOPMENT OF REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION PROCESSES THROUGH THE USE IN VACUO ELECTRON DIFFRACTION AND ELECTRON SPECTROCOPY
Rudder, R.A. ; Fountain, G.G. ; Hattangady, S.V. ; Posthill, J.B. ; Markunas, R.J.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.151-160,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
6.

Conference Proceedings
Conference Proceedings
6. HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY: AN ESSENTIAL CHARACTERIZATION TECHNIQUE FOR OPTIMIZATION OF SEMICONDUCTOR EPITAXY AND INTERFACES
Posthill, J.B. ; Fountain, G.G. ; Rudder, R.A. ; Hattangady, S.V. ; Solomon, G.S. ; Timmons, M.L. ; Markunas, R.J.
Pub. info.: High resolution microscopy of materials : symposium held November 29-December 1, 1988, Boston, Massachusetts, U.S.A..  pp.345-350,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 139
7.

Conference Proceedings
Conference Proceedings
7. HETEROEPITAXIAL NUCLEATION AND GROWTH OF Ge ON Si (100) SURFACES USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Rudder, R.A. ; Hattangady, S.V. ; Vitkavage, D.J. ; Markunas, R.J.
Pub. info.: Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.519-522,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 116