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93 results

Conference Proceedings

1. Hot spot management in ultra-low kl lithography [6156-24]

Hashimoto, K. ; Usui, S. ; Nojima, S. ; Tanaka, S. ; Yamanaka, E. ; Inoue, S.

Pub. info.:	Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560N-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6156

Conference Proceedings

2. ENVIRONMENTAL SCIENCES AND THEIR APPLIED TECHNOLOGY Recent Development of Highly Corrosion Resistant Bulk Glassy Alloys

Asami, K. ; Habazaki, H. ; Inoue, A. ; Hashimoto, K.

Pub. info.:	New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan. pp.225-230, 2005. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	502

Conference Proceedings

3. Optical lithography technologies for 45-nm node CMOS

Kawano, K. ; Sato, K. ; Hayasaki, K. ; Chiba, K. ; Hashimoto, K.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.196-203, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

4. Electromigration Performance in Al Layered Interconnects Using Ti and/or TiN Layers

Hashimoto, K. ; Kageyama, N. ; Touchi, K. ; Onoda, H.

Pub. info.:	Proceedings of the Symposium on Reliability of Metals in Electronics. pp.152-164, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-3

Conference Proceedings

5. Surface Enhanced Raman Imaging of a Patterned Self-Assembled Monolayers

Yang, X.M. ; Tryk, D.A. ; Hashimoto, K. ; Fujishima, A.

Pub. info.:	Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems. pp.159-165, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-5

Conference Proceedings

6. Protective Oxide and Sulfide Films Formed on Sputter-Deposited Amorphous Al-Mo and Al-Mo-Si Alloys at High Temperatures

Habazaki, H. ; Grzesik, Z. ; Takahiro, K. ; Yamaguchi, S. ; Hashimoto, K. ; Dabek, J. ; Danielewski, M. ; Mrowex, S.

Pub. info.:	Proceedings of the Seventh International Symposium on Oxide Films on Metals and Alloys. pp.176-187, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-25

Conference Proceedings

7. High-Speed GaAs Epitaxial Lift-off and Bonding with High Alignment Accuracy using Sapphire Plate

Sasaki, Y. ; Maeda, J. ; Koishi, T. ; Hashimoto, K. ; Shibahara, K. ; Yokoyama, S. ; Miyazaki, S. ; Hirose, M.

Pub. info.:	Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.207-213, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-36

Conference Proceedings

8. Oxidation Behavior of Amorphous Ni-Zr and Ni-Zr Rare Earth Element Alloys

Yamasaki, M. ; Habazaki, H. ; Akiyama, E. ; Kawashima, A. ; Asami, K. ; Hashimoto, K.

Pub. info.:	High temperature corrosion and materials chemistry : proceedings of the Per Kofstad Memorial Symposium. pp.180-191, 1999. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-38

Conference Proceedings

9. Detection of Intermediates Formed at the Surface of Photoexcited TiO2 and Biological Application of TiO2 Photocatalysts

Fujishima, A. ; Cai, R.-X. ; Sakai, H. ; Baba, R. ; Hashimoto, K. ; Kubota, Y.

Pub. info.:	Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993. pp.363-372, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-11

10.

Conference Proceedings

10. Influence of the Cube-Texture and the Grain Growth on the Creep Behavior in Platinum-10%Rhodium Alloy

Ochiai, S. ; Murakami, T. ; Hashimoto, K. ; Ishii, N. ; Hasegawa, K.

Pub. info.:	Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005. pp.1547-1552, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	495-497(2)

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Author: Hashimoto, K.