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10 results

Conference Proceedings

1. Proposal of a composite phase-shifting mask for 0.15-ｦﾌm hole-pattern delineation using KrF exposure

Hasegawa,N. ; Hayano,K. ; Imai,A. ; Asai,N. ; Okazaki,S.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.522-531, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

2. Development of a CPA Nd:glass/Ti:sapphire laser system for generation of coherent x-ray laser radiation

Kado,M. ; Nagashima,A. ; Nagashima,K. ; Kawachi,T. ; Hasegawa,N. ; Tanaka,M. ; Hosokai,T. ; Sukegawa,K. ; Sasaki,A. ; Kato,Y.

Pub. info.:	Soft X-ray lasers and applications III : 19-20 July 1999, Denver, Colorado. pp.242-248, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3776

Conference Proceedings

3. Automated method to check sidelobe overlap projected by adjacent apertures in attenuated phase-shift masks

Nakajo,K. ; Sakemi,J. ; Moniwa,A. ; Terasawa,T. ; Hasegawa,N. ; Tsujimoto,E.

Pub. info.:	Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.154-162, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3096

Conference Proceedings

4. Precise CD control of 140-nm gate patterns using phase-edge PSM

Hotta,S. ; Inoue,O. ; Fukuda,H. ; Hasegawa,N.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1360-1370, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

5. Lens aberration measurement technique using attentuated phase-shifting mask

Imai,A. ; Hayano,K. ; Fukuda,H. ; Asai,N. ; Hasegawa,N.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1260-1268, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Technical Paper

6. Study of Control of Transmission and Clutch on Off-Highway Dumptruck

Kishii,K. ; Sato,Y. ; Ohkura,Y. ; Murakami,T. ; Hasegawa,N. ; Ohnuki,H.

Pub. info.:	Transmissions and controls. pp.1-8, 1996. Society of Automotive Engineering, Inc.
Title of ser.:	SAE special publication
Ser. no.:	SP-1191

Conference Proceedings

7. Wafer and chip deformation caused by pattern transfer

Imai,A. ; Hasegawa,N. ; Okazaki,S. ; Sakaguchi,K.

Pub. info.:	Optical Microlithography IX. Part1 pp.104-112, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2726

Conference Proceedings

8. "X-ray laser research at Advanced Photon Research Center of JAERI, Kansai"

Kado,M. ; Kawachi,T. ; Tanaka,M. ; Hasegawa,N. ; Takahashi,K. ; Namba,S. ; Sukegawa,K. ; Sasaki,A. ; Lu,P. ; Tang,H. ; Nagashima,K. ; Daido,H. ; Kilpio,A.V. ; Kato,Y.

Pub. info.:	Soft X-Ray Lasers and Applications IV. pp.54-61, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4505

Conference Proceedings

9. Higher harmonic generation for the high coherent x-ray laser

Hasegawa,N. ; Kilpio,A.V. ; Nagashima,K. ; Kawachi,T. ; Kado,M. ; Tanaka,M. ; Namba,S. ; Takahashi,K. ; Sukegawa,K. ; Lu,P. ; Tang,H. ; Kishimoto,M. ; Renzhong,T. ; Daido,H. ; Kato,Y.

Pub. info.:	Soft X-Ray Lasers and Applications IV. pp.204-210, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4505

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Conference Proceedings

10. Development of tabletop transient collisional excitation x-ray lasers

Kado,M. ; Kawachi,T. ; Hasegawa,N. ; Tanaka,M. ; Sukegawa,K. ; Nagashima,K. ; Nagashima,A. ; Kato,Y.

Pub. info.:	High-Power Lasers in Energy Engineering. pp.278-284, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3886

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Author: Hasegawa,N.