ION CURRENT, ENERGY DISTRIBUTION, AND RADICAL SPECIES DETECTION IN RF PLASMAS BY CYLINDRICAL MIRROR ANALYZER QUADRUPOLE MASS SPECTROSCOPY
- Author(s):
- Publication title:
- Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 117
- Pub. Year:
- 1988
- Page(from):
- 61
- Page(to):
- 66
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837876 [0931837871]
- Language:
- English
- Call no.:
- M23500/117
- Type:
- Conference Proceedings
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