1.

Conference Proceedings
Conference Proceedings
1. Extending ellipsometry capabilities for ultrathin gate oxide metrology using rapid optical surface treatment technology
Tardif,F. ; Danel,A. ; Kamieniecki,E. ; Harrington,J.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.126-131,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
2.

Conference Proceedings
Conference Proceedings
2. Pushing SRAM densities beyond 0.13-μm technology in the year 2000
Bula,O. ; Mih,R.D. ; Jasinski,E. ; Hoyniak,D. ; Lu,A. ; Harrington,J. ; McGuire,A.E.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.601-611,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186