Fundamental noise in MEMS force sensors (Invited Paper)
- Author(s):
Kenny, T. W. ( Stanford Univ. (USA) ) Liang, Y. ( Stanford Univ. (USA) ) Pruitt, B. L. ( Stanford Univ. (USA) ) Harley, J. A. ( Stanford Univ. (USA) ) Bartsch, M. ( Stanford Univ. (USA) ) Rudnitsky, R. ( Stanford Univ. (USA) ) - Publication title:
- Noise and Information in Nanoelectronics, Sensors, and Standards II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5472
- Pub. Year:
- 2004
- Page(from):
- 143
- Page(to):
- 151
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453945 [0819453943]
- Language:
- English
- Call no.:
- P63600/5472
- Type:
- Conference Proceedings
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