1.

Conference Proceedings
Conference Proceedings
1. Laser cleaning of optical elements in 157-nm lithography
Bloomstein,T.M. ; Rothschild,M. ; Liberman,V. ; Hardy,D.E. ; Efremow,N.N.,Jr. ; Palmacci,S.T.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1537-1545,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Optical materials and coatings at 157 nm
Bloomstein,T.M. ; Liberman,V. ; Rothschild,M. ; Hardy,D.E. ; Goodman,R.B.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.342-349,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. UV cleaning of contaminated 157-nm reticles
Bloomstein,T.M. ; Liberman,V. ; Rothschild,M. ; Efremow Jr.,N.N. ; Hardy,D.E. ; Palmacci,S.T.
Pub. info.: Optical Microlithography XIV.  4346  pp.669-675,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346