1.

Conference Proceedings
Conference Proceedings
1. Estimation of optical proximity effect caused by mask fabrication error
Kamon,K. ; Hanawa,T. ; Moriizumi,K.
Pub. info.: Optical Microlithography X.  pp.781-789,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
2.

Conference Proceedings
Conference Proceedings
2. Fast and accurate optical proximity correction based on aerial image simulation
Hanawa,T. ; Kamon,K. ; Nakae,A. ; Nakao,S. ; Moriizumi,K.
Pub. info.: Optical Microlithography IX.  Part2  pp.640-650,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726