Kim, G. G. ; Kim, J. H. ; Lee, K. Y. ; Kim, S. J. ; Lee, D. H. ; Hur, D. H. ; Choi, M. S. ; Han, J. H.
Pub. info.:
Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea. pp.137-140, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Chung, U. I. ; Hah, S. R. ; Han, J. H. ; Hong, C. K. ; Kang, G. W. ; Kim, K. H.
Pub. info.:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.33-44, 2000. Warrendale, PA. Materials Research Society