1.

Conference Proceedings
Conference Proceedings
1. Characterization of Process-Induced Defects in Silicon Technology
Cerva, H. ; Hammerl, E. ; Lemme, R. ; Schwalke, U. ; Wangemann, K. ; Zoth, G.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.55-67,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
2.

Conference Proceedings
Conference Proceedings
2. Oxidation-Enhanced Diffusion of Boron in Silicon-on-Insulator Substrates
Pindl, S. ; Biebl, M. ; Hammerl, E. ; Schaefer, H. ; von Philipsborn, H.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.623-632,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
3.

Conference Proceedings
Conference Proceedings
3. HIGH DEFINITION MESA GROWTH BY SILICON MBE
Hammerl, E. ; Wittmann, F. ; Messarosch, J. ; Eisele, I. ; Huber, V. ; Oppolzer, H.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.27-34,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
4.

Conference Proceedings
Conference Proceedings
4. Dislocation Formation in Trench-Based Dynamic Random Access Memory (DRAM) Chips
Ho, H. ; Hammerl, E. ; Stengl, R. ; Benedict, J.
Pub. info.: Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.459-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 405