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Hanf, M. ; Schaporin, A.V. ; Hahn, R. ; Dotzel, W. ; Gessner, T.
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Kurth, S. ; Kaufmann, C. ; Hahn, R. ; Mehner, J. ; Dotzel, W. ; Gessner, T.
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MOEMS Display and Imaging Systems III . pp.23-33, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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5721