1.

Conference Proceedings
Conference Proceedings
1. EVALUATION OF CHELATE ADDED APM CLEANING SOLUTIONS
Chung, S.P. ; Chang, K.H. ; Lee, K.T. ; Kwon, Y.M. ; Hah, S.R. ; Moon, J.T. ; Lee, S.I.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.114-120,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. A Quantitative Model for Oxide Erosion in Chemical Mechanical Polishing of Tungsten
Yoon, B.U. ; Jeong, I.K ; Kim, J.Y. ; Lee, J.W. ; Hah, S.R. ; Moon, J.T. ; Lee, S.I.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.616-624,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37