Atomic Force Microscope-Based Lithography of Titanium
- Author(s):
Gordon, A. E. Litfin, D. D. Hagedorn, M. S. Chen, J. Fayfield, R. T. Higman, T. K. - Publication title:
- Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 380
- Pub. Year:
- 1995
- Page(from):
- 125
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992832 [1558992839]
- Language:
- English
- Call no.:
- M23500/380
- Type:
- Conference Proceedings
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