Iwasaki, T. ; Tsumori, Y. ; Nakai, K. ; Haga, H. ; Kojima, K. ; Nakashizu, T.
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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.744-755, 1994. Pennington, NJ. Electrochemical Society
Ikari, A. ; Haga, H. ; Yoda, O. ; Uedono, A. ; Ujihira, Y.
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Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.69-74, 1992. Pittsburgh, Pa.. Materials Research Society
Tsumori, Y. ; Nakai, K. ; Iwasaki, T. ; Haga, H. ; Kojima, K. ; Nakashizu, T.
Pub. info.:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.23-, 1995. Pittsburgh, PA. MRS - Materials Research Society