1.

Conference Proceedings
Conference Proceedings
1. 2D measurement using CD SEM for arbitrarily shaped patterns
H.-J. Lee ; S.-Y. Bae ; D.-H. Chung ; S.-G. Woo ; H. Cho
Pub. info.: Photomask technology 2007.  2  pp.673037-1-673037-8,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
2.

Conference Proceedings
Conference Proceedings
2. Porosity characteristics of ultra-low dielectric insulator films directly patterned by nano- imprint .lithography
H. W. Ro ; R. L. Jones ; H. Peng ; H.-J. Lee ; E. K. Lin
Pub. info.: Emerging lithographic technologies XII.  1  pp.69211M-1-69211M-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECTS OF pH ADJUSTORS IN POST Cu CMP CLEANING SOLUTIONS ON PARTICLE ADHESION AND REMOVAL
Y.-K. Hong ; J.-H. Song ; Y.-J. Kang ; I.-K. Kim ; J.-G. Park ; H.-S. Song ; K.-S. Kim ; J.-J. Myung ; H.-J. Lee ; S.-Y. Song
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.333-340,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
4.

Conference Proceedings
Conference Proceedings
4. Control of Largely-Deformed Nonlinear Electro/Elastic Beam and Plate Systems: Finite Element Formulation and Analysis
D. W. Wang ; H. S. Tzou ; H.-J. Lee
Pub. info.: Recent advances in solids and structures 2002 : presented at the 2002 ASME International Mechanical Engineering Congress and Exposition, November 17-22, 2002, New Orleans, Louisiana.  451  pp.217-226,  2002.  New York, N.Y..  American Society of Mechanical Engineers
Title of ser.: Proceedings of the ASME Pressure Vessels and Piping Division
Ser. no.: 451
5.

Conference Proceedings
Conference Proceedings
5. Exploring the limitations of x-ray reflectivity as a critical dimension pattern shape metrology
H.-J. Lee ; S. Kim ; C. L. Soles ; E. K. Lin ; W. Wu
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692224-1-692224-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
6.

Conference Proceedings
Conference Proceedings
6. Flexible Bragg reflection waveguide devices fabricated on a plastic substrate
K.-J. Kim ; J.-A. Yi ; M.-C. Oh ; Y.-O. Noh ; H.-J. Lee
Pub. info.: Nanoengineering--fabrication, properties, optics, and devices IV.  6645  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6645
7.

Conference Proceedings
Conference Proceedings
7. A robust digital watermarking scheme by use of integral imaging technique
D.-C. Hwang ; H.-J. Lee ; D.-H. Shin ; E.-S. Kim
Pub. info.: Mobile Multimedia/Image Processing for Military and Security Applications 2007.  6579  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6579
8.

Conference Proceedings
Conference Proceedings
8. Integrated design method of MR damper and electromagnetic induction system for structural control
H.-J. Lee ; S.-J. Moon ; H.-J. Jung ; Y.-C. Huh ; D.-D. Jang
Pub. info.: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008.  1  pp.69320S-1-69320S-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6932
9.

Conference Proceedings
Conference Proceedings
9. Large-scale smart passive system for civil engineering applications
H.-J. Jung ; D.-D. Jang ; H.-J. Lee ; S.-W. Cho
Pub. info.: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2008.  1  pp.69320T-1-69320T-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6932