1.

Conference Proceedings
Conference Proceedings
1. Synthesis and Characterization of Exfoliated Natural Mica/Polymer Nanocomposites
K. Tamura ; H. Uno ; H. Yamada
Pub. info.: THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canad.  539-543  pp.948-955,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 539-543(1)
2.

Conference Proceedings
Conference Proceedings
2. High-performance reticle inspection tool for the 65-nm node and beyond
T. -Y. Kang ; C. -H. Chen ; C. -H. Ho ; L. Hsu ; Y. -C. Ku ; K. Nakamura ; H. Moribe ; T. Bashomatsu ; K. Matsumura ; K. Hatta ; H. Takahashi ; A. Uehara ; T. Igeta ; H. Uno ; R. Igarashi ; H. Matsuda
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607