1.

Conference Proceedings

Conference Proceedings
H. San ; X. Chen ; P. Xu ; F. Li ; M. Cheng
Pub. info.: Infrared technology and applications XXXIV.  2  pp.69401T-1-69401T-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6940
2.

Conference Proceedings

Conference Proceedings
P. Xu ; H. San ; X. Chen
Pub. info.: Micro (MEMS) and nanotechnologies for space, defense and security II : 18-20 April, 2008, Orlando, Florida, USA.  pp.695917-1-695917-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6959
3.

Conference Proceedings

Conference Proceedings
X. Chen ; U. Hanke ; H. San ; G. Li ; L. Zhan
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360H-1-68360H-14,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
4.

Conference Proceedings

Conference Proceedings
H. San ; L. Zhan ; P. Xu ; G. Li ; X. Chen
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360K-1-68360K-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
5.

Conference Proceedings

Conference Proceedings
G. Li ; L. Zhan ; H. San ; P. Xu ; X. Chen
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360J-1-68360J-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
6.

Conference Proceedings

Conference Proceedings
Y. Zhang ; L. Li ; H. San ; X. Chen
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360Y-1-68360Y-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
7.

Conference Proceedings

Conference Proceedings
L. Zhan ; H. San ; G. Li ; P. Xu ; X. Chen
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360Z-1-68360Z-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
8.

Conference Proceedings

Conference Proceedings
L. Li ; Y. Zhang ; H. San ; Y. Guo ; X. Chen
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.683610-1-683610-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
9.

Conference Proceedings

Conference Proceedings
H. San ; X. Chen ; M. Cheng ; F. Li
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360N-1-68360N-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836
10.

Conference Proceedings

Conference Proceedings
F. Li ; H. San ; M. Cheng ; X. Chen
Pub. info.: Design, manufacturing, and testing of micro- and nano-optical devices and systems : 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China.  pp.728406-1-728406-4,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7284