1.

Conference Proceedings
Conference Proceedings
1. An Outgas Free Passivation Technology for Semiconductor Vacuum Chamber using Advanced Anodic Oxidation
Y. Kawase ; M. Kitano ; F. Mizutani ; H. Morinaga ; Y. Shirai
Pub. info.: Corrosion (General).  pp.67-71,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(9)
2.

Conference Proceedings
Conference Proceedings
2. THE EFFECT OF OXYGEN CONCENTRATION IN CLEANING PROCESS ON SILICON SURFACE
N. Mizutani ; H. Morinaga ; A. Teramoto ; T. Ohmi
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.75-81,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
3.

Conference Proceedings
Conference Proceedings
3. SUPRESSION OF SURFACE MICRO-ROUGHNESS OF SILICON WAFER BY ADDITION OF ALCOHOL INTO ULTRA PURE WATER FOR RINSING PROCESS
M. Yamamoto ; K. Nii ; H. Morinaga ; A. Teramoto ; T. Ohmi
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.51-58,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)