1.

Conference Proceedings

Conference Proceedings
J. de Klerk ; C. Wagner ; R. Droste ; L. Levasier ; L. Jorritsma ; E. van Setten ; H. Kattouw ; J. Jacobs ; T. Heil
Pub. info.: Optical microlithography XX.  6520  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings

Conference Proceedings
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521