1.

Conference Proceedings

Conference Proceedings
S. Kim ; H. Jeon
Pub. info.: Atomic layer deposition applications 2.  pp.89-98,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(15)
2.

Conference Proceedings

Conference Proceedings
H. Kong. S. Kim ; J. Kim ; J. Choi ; H. Jeon ; C. Bae
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.459-464,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
3.

Conference Proceedings

Conference Proceedings
H. Jeon ; C. Shim ; J. Hong ; J. Han ; K. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518