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10 results

Conference Proceedings

1. Fine Keyed Alignment and Bonding for Wafer-Level 3D Ics

Lee, Sang Hwui ; Niklaus, Frank ; McMahon, J. Jay ; Yu, Jian ; Kumar, Ravi J. ; Li, Hui-feng ; Gutmann, Ronald J. ; Cale, Timothy S. ; Lu, J-Q.

Pub. info.:	Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.433-438, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	914

Conference Proceedings

2. Low-Temperature PETEOS-to-PETEOS Wafer Bonding Using Titanium as Bonding Intermediate

Yu, Jian ; Moore, Richard L. ; Lee, Sang Hwui ; McMahon, J. Jay ; Lu, Jian-Qiang ; Gutmann, Ronald J.

Pub. info.:	Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.427-432, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	914

Conference Proceedings

3. Chemical-Mechanical Planarization Issues in Patterning Copper and Aluminum Interconnects with Magnetic Liners

Gutmann, Ronald J. ; Wang, Bin ; Lee, Byung-Chan ; Paul Chow, T. ; Duquette, David J.

Pub. info.:	Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.118-135, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-37

Conference Proceedings

4. ELECTRICAL PROPERTIES OF SIPOS FILMS DEPOSITED ON CRYSTALLINE SILICON

Chuang, Tien-Min ; Rose, Kenneth ; Gutmann, Ronald J.

Pub. info.:	Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.383-388, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	164

Conference Proceedings

5. VISCOELASTIC STRESS RELIEF IN PATTERNED SILICON-ON-INSULAR STRUCTURES

Letavic, Theodor J. ; Maby, Edwadr W. ; Gutmann, Ronald J.

Pub. info.:	Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.327-332, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	130

Conference Proceedings

6. Chemical Mechanical Polishing of Polymer Films: Comparison of Benzocyclobutene(BCB) and Parylene-N Films by XPS and AFM

Yang, G-R. ; Zhao, Y-P. ; Neirynck, Jan M. ; Murarka, Shyam P. ; Gutmann, Ronald J.

Pub. info.:	Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.161-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	476

Conference Proceedings

7. Synthesis of Model Alumina Slurries for Damascene Patterning of Copper

Lee, Byung-Chan ; Duquette, David J. ; Gutmann, Ronald J.

Pub. info.:	Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	671

Conference Proceedings

8. Mechanisms of Low-Temperature Ti/Si-Based Wafer Bonding

Yu, Jian ; Wang, Yinmin ; Haberl, Arthur W. ; Bakhru, Hassa ; Lu, Jian-Qiang ; Gutmann, Ronald J.

Pub. info.:	Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.387-392, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	863

Conference Proceedings

9. COPPER METALLIZATION MANUFACTURING ISSUES FOR FUTURE ICs

Gutmann, Ronald J. ; Chow, T. Paul ; Gill, William N. ; Kaloyeros, Alain E. ; Lanford, William A. ; Murarka, Shyam P.

Pub. info.:	Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.41-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	337

10.

Conference Proceedings

10. Low Dielectric Constant Polymers for On-Chip Interlevel Dielectrics with Copper Metallization

Gutmann, Ronald J. ; Chow, T. Paul ; Duquette, David J. ; Lu, Toh-Ming ; McDonald, John F. ; Murarka, Shyam P.

Pub. info.:	Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.177-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	381

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