1.

Conference Proceedings
Conference Proceedings
1. Modeling and Analyzing on Nonuniformity of Material Removal in Chemical Mechanical Polishing of Silicon Wafer
Su, J. X. ; Guo, D. M. ; Kang, R. K. ; Jin, Z. J. ; Li, X. J. ; Tian, Y. B.
Pub. info.: Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China.  pp.26-31,  2004.  Zurich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 471-472
2.

Conference Proceedings
Conference Proceedings
2. Investigation on Material Removal Rate in Rotation Grinding for Large-Scale Silicon Wafer
Tian, Y. B. ; Kang, R. K. ; Guo, D. M. ; Jin, Z. J. ; Su, J. X.
Pub. info.: Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China.  pp.362-368,  2004.  Zurich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 471-472