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25 results

Conference Proceedings

1. Recent developments in EUV reflectometry at the Advanced Light Source

Gullikson,E.M. ; Mrowka,S. ; Kaufmann,B.B.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.363-373, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

2. Multilayer optics for an extreme-ultraviolet lithography tool with 70-nm resolution

Soufli,R. ; Spiller,E.A. ; Schmidt,M.A. ; Davidson,J.C. ; Grabner,R.F. ; Gullikson,E.M. ; Kaufmann,B.B. ; Mrowka,S. ; Baker,S.L. ; Chapman,H.N. ; Hudyma,R.M. ; Taylor,J.S. ; Walton,C.C. ; Montcalm,C. ; Soufli,R.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.51-59, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

3. Multilayer coating and tests of a 10｡ﾟ extreme-ultraviolet lithographic camera

Spiller,E.A. ; Weber,F.J. ; Montcalm,C. ; Baker,S.L. ; Gullikson,E.M. ; Underwood,J.H.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.62-71, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

4. Scattering from normal-incidence EUV optics (Invited Paper)

Gullikson,E.M.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.72-80, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

5. Beamline for measurement and characterization of multilayer optics for EUV lithography

Underwood,J.H. ; Gullikson,E.M.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.52-61, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

6. Elastic bending and water cooling strategies for producing high-quality synchrotron radiation mirrors in silicon (Invited Paper)

Underwood,J.H. ; Batson,P.J. ; Beguiristain,R. ; Gullikson,E.M.

Pub. info.:	Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California. pp.88-95, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3152

Conference Proceedings

7. Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region

Soufli,R. ; Gullikson,E.M.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.222-229, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

Conference Proceedings

8. Beamline for metrology of x-ray/EUV optics at the Advances Light Source (Invited Paper)

Underwood,J.H. ; Gullikson,E.M. ; Koike,M. ; Batson,P.J.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.214-221, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

Conference Proceedings

9. Nonspecular scattering from multilayer mirrors at normal incidence

Gullikson,E.M. ; Stearns,D.G. ; Gaines,D.P. ; Underwood,J.H.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.412-419, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

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Conference Proceedings

10. Determination of optical constants for AXAF mirrors from 0.05 to 1.0 keV through reflectance measurements

Harris,B. ; Burek,A.J. ; Fitch,J.J. ; Graessle,D.E. ; Schwartz,D.A. ; Blake,R.L. ; Gullikson,E.M.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.40-51, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

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