BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia. pp.378-382, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Prasad, K. ; Yuan, X.L. ; Tan, C.M. ; Zhang, D.H. ; Li, C. Y. ; Wang, S.R. ; Yuan, S.Y.J. ; Xie, J.L. ; Gui, D. ; Foo, P.D.
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.395-400, 2002. Warrendale. Materials Research Society