1.

Conference Proceedings
Conference Proceedings
1. Oxygen influence on titanium silicide formation
Bentini, G. G. ; Berti, M. ; Cohen, C. ; Drigo, A. V. ; Guerri, S. ; Nipoti, R. ; Siejka, J.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.137-142,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25
2.

Conference Proceedings
Conference Proceedings
2. ELECTRICAL CHARACTERIZATION OF ION IMPLANTED, THERMALLY ANNEALED TiN FILMS ACTING AS DIFFUSION BARRIERS ON SHALLOW JUNCTION SILICON DEVICES
Armigliato, A. ; Finetti, M. ; Gabilli, E ; Guerri, S. ; Ostoja, P. ; Sabato, G. ; Scorzoni, A.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.183-188,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45