1.

Conference Proceedings

Conference Proceedings
Heckele,M. ; Gerlach,A. ; Guber,A.E. ; Schaller,T.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.469-477,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
2.

Conference Proceedings

Conference Proceedings
Guber,A.E. ; Wieneke,P.
Pub. info.: Biomedical sensing, imaging, and tracking technologies I : 29-31 January 1996, San Jose, California.  pp.2-13,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2676
3.

Conference Proceedings

Conference Proceedings
Kohler,U. ; Guber,A.E. ; Bier,W. ; Heckele,M. ; Schaller,Th.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.18-22,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687
4.

Conference Proceedings

Conference Proceedings
Guber,A.E. ; Kohler,U.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing.  pp.147-155,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2637