Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
Groeseneken, G. ; Degraeve, R. ; De Blauwe, J. ; Roussel, P. ; Depas, M. ; Maes, H.
Pub. info.:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.3-19, 1997. Pennington, New Jersey. Electrochemical Society
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.173-198, 2003. Pennington, N.J.. Electrochemical Society
Nigam, T. ; Degraeve, R. ; Groeseneken, G. ; Heyns, M. ; Maes, H. E.
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Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.337-, 2000. Warrendale, PA. MRS-Materials Research Society
Groeseneken, G. ; Degraeve, R. ; Kaczer, B. ; Maes, H. E.
Pub. info.:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.295-, 2000. Warrendale, PA. MRS-Materials Research Society
Radhakrishnan, M.K. ; Vassilev, V. ; Keppens, B. ; De Heyn, V. ; Natarajan, M. ; Groeseneken, G.
Pub. info.:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001). VOL-1 pp.557-557, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
De Gendt, S. ; Brunco, D. ; Caymax, M. ; Canard, T. ; Date, L. ; Delabie, A. ; Deweerd, W. ; Groeseneken, G. ; Houssa, M. ; Hyun, S. ; Kaushik, V. ; Kubicek, S. ; Maes, J. ; Pantisano, L. ; Ragnarsson, L. ; Rohr, E. ; Schram, T. ; Shimamoto, Y. ; Sleeckx, E. ; Vandervorst, W. ; Van Elshocht, S. ; Yamamoto, K. ; Witters, T. ; Zhao, C. ; Zimmerman, P. ; Heyns, M. (Invited Paper)
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Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.109-117, 2005. Pennington, NJ. Electrochemical Society
Pantisano, L. ; Afanas'ev, V. ; Ragnarsson, L-A. ; Houssa, M. ; Degraeve, R. ; Groeseneken, G. ; Schram, T. ; DeGendt, S. ; Heyns, M.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.144-158, 2005. Pennington, N.J.. Electrochemical Society
Kaczer, B ; Degraeve, R. ; Arkhipov, V. ; Groeseneken, G.
Pub. info.:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.307-326, 2005. Pennington, N.J.. Electrochemical Society