1.

Conference Proceedings
Conference Proceedings
1. 0.25-ｦﾌm logic manufacturability using practical 2D optical proximity correction
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. "Polarized phase shift mask: concept, design, and potential advantages to photolithography process and physical design"
Wang,R. ; Grobman,W.D. ; Reich,A.J. ; Thompson,M.A.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.406-417,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562