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23 results

Conference Proceedings

1. Electrical and Optical Properties and Applications of Diamond-like Carbon

Grill, A.

Pub. info.:	Diamond materials : proceedings of the sixth international symposium. pp.252-263, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-32

Conference Proceedings

2. Chemcterization of Low-k to Extreme Low-k SiCOH Dielectrics

Grill, A. ; Neumayer, D.A.

Pub. info.:	Dielectrics in emerging technologies : proceedings of the international symposium. pp.315-322, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-1

Conference Proceedings

3. High-speed lateral PIN photodiodes in silicon technologies

Schaub, J.D. ; Koester, S.J. ; Dehlinger, G. ; Ouyang, Q.C. ; Guckenberger, D. ; Yang, M. ; Rogers, D.L. ; Chu, J. ; Grill, A.

Pub. info.:	Semiconductor photodetectors : 28-29 January 2004, San Jose, California, USA. pp.1-11, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5353

Conference Proceedings

4. Tribology of Diamond-Like Carbon Coatings for Vacuum and Space Applications

Donnet, C. ; Le Mogne, T. ; Belin, M. ; Grill, A. ; Patel, V. ; Jahnes, C.

Pub. info.:	Proceedings of the Fifth International Symposium on Diamond Materials. pp.455-464, 1997. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-32

Conference Proceedings

5. Diamondlike Carbon Materials for the BEOL Interlayer Dielectric Applications

Grill, A. ; Jahnes, C. ; Ott, J. ; Patel, V. ; Cohln, S. ; Hummel, J. ; Mih, R. ; Liu, J.

Pub. info.:	Dielectric material integration for microelectronics. pp.118-128, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

6. High-Dielectric Constant Insulators and the AMLCD Process: Is Amorphous BST a Candidate?

Dimitrakopoulos, C. ; Duncombe, P. ; Grill, A. ; Laibowitz, R. ; Libsch, F. ; Neumayer, D. ; ry, P. ; Wisnieff, R.

Pub. info.:	Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.. pp.129-134, 2000. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	558

Conference Proceedings

7. Multiphase Low-k Materials Prepared by PECVD

Grill, A. ; Patel, V.

Pub. info.:	Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.55-62, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-5

Conference Proceedings

8. DIAMOND-LIKE AND NITROGEN DOPED DIAMOND-LIKE CARBON DEPOSITED BY DC PACVD

Grill, A. ; Patel, V.

Pub. info.:	Proceedings of the Third International Symposium on Diamond Materials. pp.442-447, 1993. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-17

Conference Proceedings

9. Novel Low-k Dielectrics Based on DLC Materials

Grill, A. ; Patel, V. ; Jahnes, C.

Pub. info.:	Proceedings of the Fifth International Symposium on Diamond Materials. pp.512-520, 1997. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-32

10.

Conference Proceedings

10. BOTTOM ELECTRODES FOR HIGH DIELECTRIC OXIDE COMPOUNDS: EFFECTS ON CRYSTALLIZATION OF LEAD CONTAINING FERRO-ELECTRICS

Grill, A. ; Beach, D. ; Smart, C. ; Kane, W.

Pub. info.:	Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.. pp.189-, 1992. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	310

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