1.

Conference Proceedings
Conference Proceedings
1. What Does Self-Diffusion Tell Us About Ultra Shallow Junctions?
Ural, Ant ; Koh, Serene ; Griffin, P. B. ; Plununer, J. D.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B4.11-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. The Influence of Amorphizing Implants on Boron Diffusion in Silicon
Chao, H. S. ; Griffin, P. B. ; Plummer, J. D.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.347-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
3.

Conference Proceedings
Conference Proceedings
3. Two-Dimensional Dopant Diffusion Study Using Scanning Capacitance Microscopy
Yu, G. M. ; Griffin, P. B. ; Plummer, J. D.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.233-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
4.

Conference Proceedings
Conference Proceedings
4. Linking Ab Initio Energetics to Experiment: Kinetic Monte Carlo Simulation of Transient Enhanced Diffusion of B in Si
Theiss, S. K. ; Caturla, M-J. ; Rubia, T. Diaz de la ; Johnson, M. C. ; Ural, A. ; Griffin, P. B.
Pub. info.: Multiscale modelling of materials : symposium held November 30-December 3, 1998, Boston, Massachusets, U.S.A..  pp.291-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 538
5.

Conference Proceedings
Conference Proceedings
5. Experimental Study of Self-Diffusion in Silicon Using Isotopically Enriched Structures
Ural, A. ; Griffin, P. B. ; Plummer, J. D.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.97-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568