1.
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Conference Proceedings
|
Finders,J. ; Jorritsma,L. ; Eurlings,M. ; Moerman,R. ; Greevenbroek,H.van ; Schoot,J.B.van ; Flagello,D.G. ; Socha,R.J. ; Stammler,T.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.153-165, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
2.
|
Conference Proceedings
|
Laan,H.van der ; Dierichs,M. ; Greevenbroek,H.van ; McCoo,E. ; Stoffels,F. ; Pongers,R. ; Willekers,R.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.394-407, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|