1.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Weilemann,M.R. ; Green,K.G. ; Dwyer,J. ; Robertson,E. ; Hershey,R.R.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.461-470,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Allgair,J. ; Fu,C.-C. ; Green,K.G. ; Hershey,R.R. ; Kling,M.E. ; Litt,L.C. ; Lucas,K.D. ; Roman,B.J. ; Seligman,C.S. ; Schippers,M.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.220-227,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Cave,N. ; Falch,B.J. ; Fu,C.-C. ; Green,K.G. ; Lucas,K.D. ; Roman,B.J. ; Reich,A.J. ; Sturtevant,J.L. ; Tian,R. ; Russell,D.R. ; Karklin,L. ; Wang,Y.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.10-17,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
4.

Conference Proceedings

Conference Proceedings
Kamat,V.G. ; Green,K.G. ; Chheda,S.N. ; Muehie,S. ; Kolagunta,V. ; Wilkinson,B. ; Philbin,C.E.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.727-733,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
5.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Allgair,J. ; Barrick,M.W. ; Fu,C. ; Green,K.G. ; Hershey,R.R. ; Litt,L.C. ; Maltabes,J.G. ; Nelson,C. ; Roman,B.J. ; Singelyn,J.
Pub. info.: Optical Microlithography X.  pp.137-145,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051