1.

Conference Proceedings
Conference Proceedings
1. Sensitivity Analysis of Plasma Chemistry for High Density Discharges
Lee, C. ; Lieberman, M.A. ; Graves, D.B.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.78-86,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings
Conference Proceedings
2. Modeling Inductively Coupled Plasma Tools with Chlorine Chemistry
Bukowski, J.D. ; Stewart, R. A. ; Graves, D.B. ; Vitello, P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.87-96,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
3.

Conference Proceedings
Conference Proceedings
3. The Role of Electrode Characteristics in Particulate Trapping in RF Discharges
Daugherty, J.E. ; Graves, D.B.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.97-108,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
4.

Conference Proceedings
Conference Proceedings
4. Modeling Neutral Beam Processes
Kilgore, M.D. ; Graves, D.B.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.109-119,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
5.

Conference Proceedings
Conference Proceedings
5. Modeling of Pulsed-Power Inductively Coupled Plasma Reactors
Bukowski, J.D. ; Stewart, R.A. ; Graves, D.B. ; Vitello, P.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.564-574,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2