Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.143-151, 1999. Pennington, N.J.. Electrochemical Society
Graham, L. ; Steinbruchel, C. ; Duquette , D.J. ; Chen, L.
Pub. info.:
Fundamental aspects of electrochemical deposition and dissolution : proceedings of the international symposium. pp.27-37, 1999. Pennington, New Jersey. Electrochemical Society
Gross, M. E. ; Drese, R. ; Lingk, C. ; Brown, W. L. ; Evans-Lutterodt, K. ; Barr, D. ; Golovin, D. ; Ritzdorf, T. ; Turner, J. ; Graham, L.
Pub. info.:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.379-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Barr, D. ; Brown, W. L. ; Drese, R. ; Evans-Lutterodt, K. ; Golovin, D. ; Graham, L. ; Gross, M. E. ; Lingk, C. ; Ritzdorf, T. ; Turner, J.
Pub. info.:
Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.215-222, 1999. Warrendale, PA. Materials Research Society