1.

Conference Proceedings
Conference Proceedings
1. The Conversion of Czochralski Silicon From p-Type to n-Type by Hydrogen Plasma-Enhanced Thermal Donor Formation
Job, R. ; Borchert, D. ; Bumay, Yu. A. ; Fahrner, W. R. ; Grabosch, G. ; Khorunzhii, I. A. ; Ulyashin, A. G.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.101-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
2.

Conference Proceedings
Conference Proceedings
2. Critical enabling properties of CaF2 lens blanks for state-of-the-art lithography tools
Hahn, J. ; Grabosch, G. ; Parthier, L. ; Knapp, K.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.734-741,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Strong improvement of critical parameters of CaF2 lens blanks for 193-nm and 157-nm lithography
Grabosch, G. ; Parthier, L. ; Kruell, P. ; Knapp, K.
Pub. info.: Optical Microlithography XVII.  pp.1781-1786,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
4.

Conference Proceedings
Conference Proceedings
4. Analysis of laser durability of CaF2 for optical lithography (Abstract Only)
Grabosch, G. ; Parthier, L. ; Natura, U. ; Pobi, K. ; Letz, M. ; Miihlig, C. ; Knapp, K.
Pub. info.: Laser-Induced Damage in Optical Materials: 2004.  pp.313-313,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5647