1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Design of laser system for Subaru LGS AO
Hayano, Y. ; Saito, Y. ; Saito, N. ; Akagawa, K. ; Kamata, Y. ; Kanzawa, T. ; Kurakami, T. ; Takato, N. ; Colley, S. ; Eldred, M. ; Kane, T. ; Guyon, O. ; Oya, S. ; Watanabe, M. ; Hattori, M. ; Golota, T. ; Dinkins, M. ; Kobayashi, N. ; Minowa, Y. ; Goto, M. ; Arimoto, N. ; Wada, S. ; Takami, H. ; Iye, M.
Pub. info.: Advancements in adaptive optics : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1088-1095,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5490
3.

Conference Proceedings
Conference Proceedings
3. Design of the Subaru laser guide star adaptive optics module
Watanabe, M. ; Takami, H. ; Takato, N. ; Colley, S. ; Eldred, M. ; Kane, T. ; Guyon, O. ; Hattori, M. ; Goto, M. ; Iye, M. ; Hayano, Y. ; Kamata, Y. ; Arimoto, N. ; Kobayashi, N. ; Minowa, Y.
Pub. info.: Advancements in adaptive optics : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1096-1104,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5490
4.

Conference Proceedings
Conference Proceedings
4. Low-Temperature-Proceeded Gate Insulator for Poly-Si TFTs by Combination of Photo-Oxidation and PECVD
Nakata, Y. ; Okamoto, T. ; Goto, M. ; Azuma, K.
Pub. info.: Thin Film Transistor Technologies VI : proceedings of the international symposium.  pp.176-189,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-23
5.

Conference Proceedings
Conference Proceedings
5. Purification of Enzyme by Affinity Separation with Magnetic Adsorbent
Goto, M. ; Imamura, T. ; Hirose, T.
Pub. info.: Fundamentals of adsorption : proceedings of the Fourth International Conference on Fundamentals of Adsorption, Kyoto, May 17-22, 1992.  pp.227-,  1993.  Tokyo.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 80
6.

Conference Proceedings
Conference Proceedings
6. Inverse Chromatography for Distributed Pore and Solute Sizes
Goto, M. ; McCoy, B.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
7.

Conference Proceedings
Conference Proceedings
7. Adsorptive Desiccant Cooling System using a Monolith Rotary Dehumidifier Operated with Thermal Swing
Kodama, A. ; Jin, W. ; Goto, M. ; Hirose, T.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
8.

Conference Proceedings
Conference Proceedings
8. Citrus Oil Processing by Supercritical Pressure Swing Adsorption
Sato, M. ; Goto, M. ; Kodama, A. ; Hirose, T.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
9.

Conference Proceedings
Conference Proceedings
9. Dielectric Degradation of Gate SiO2 Films by Cu Contamination Posterior to Polvcrvstalline Si Gate MOS Canacitor Fabrication
Onizawa, T. ; Higuchi, K. ; Goto, M. ; Tokuda, N. ; Hasunuma, R. ; Yamabe, K.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.317-326,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
10.

Conference Proceedings
Conference Proceedings
10. Citrus Oil Processing by Supercritical Pressure Swing Adsorption
Sato, M. ; Goto, M. ; Kodama, A. ; Hirose, T.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997