1.

Conference Proceedings
Conference Proceedings
1. SILICIDE AS DOPANT SOURCE: ULTRASHALLOW N AND P JUNCTIONS IN SILICON
Herner, S.B. ; Gossmann, H.-J. ; Tung, R.T. ; Gila, B.P.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1224-1231,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
2.

Conference Proceedings
Conference Proceedings
2. BORON-ENHANCED-DIFFUSION OF BORON FROM ULTRA- LOW-ENERGY BORON IMPLANTATION
Agarwal, A. ; Eaglesham, D.J. ; Gossmann, H.-J. ; Pelaz, L. ; Herner, S.B. ; Jacobson, D.C. ; Haynes, T.E. ; Erokhin, Yu E.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1232-1240,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. VACANCY SUPERSATURATION PRODUCED BY HIGH-ENERGY ION IMPLANTATION
Venezia, V.C. ; Eaglesham, D.J. ; Haynes, T.E. ; Agarwal, A. ; Jacobson, D.C. ; Gossmann, H.-J. ; Friessnegg, T. ; Nielsen, B.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.926-937,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
4.

Conference Proceedings
Conference Proceedings
4. INVITED: DOPANTS AND INTRINSIC POINT-DEFECTS DURING Si DEVICE PROCESSING
Gossmann, H.-J.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.884-898,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
5.

Conference Proceedings
Conference Proceedings
5. SURFACE STUDIES OF SILICON WITH A HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPE
Gibson, J.M. ; McDonald, M.L. ; Unterwald, F.C. ; Gossmann, H.-J. ; Bean, J.C. ; Tung, R.T.
Pub. info.: Layered structures and epitaxy : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.39-42,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 56
6.

Conference Proceedings
Conference Proceedings
6. MEASURING VACANCY DIFFUSIVITY AND VACANCY ASSISTED CLUSTERING BY NITRIDATION ENHANCED DIFFUSION OF Sb IN Si(100) DOPING SUPERLATTICES
Mogi, Toshiharu K. ; Gossmann, H.-J. ; Rafferty, C. S. ; Luftman, H. S. ; Unterwald, F. C. ; Boone, T. ; Thompson, Michael O. ; Poate, J. M.
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.157-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355
7.

Conference Proceedings
Conference Proceedings
7. UNDERSTANDING AND CONTROLLING TRANSIENT ENHANCED DOPANT DIFFUSION IN SILICON
Stolk, P. A. ; Gossmann, H.-J. ; Eaglesham, D. J. ; Jacobson, D. C. ; Luftman, H. S. ; Poate, J. M.
Pub. info.: Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.307-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 354
8.

Conference Proceedings
Conference Proceedings
8. Influence Of Vacuum Annealing on Native Si Point Defects
Gossmann, H.-J. ; Mogi, T.K. ; Rafferty, C.S. ; Stolk, P.A. ; Eaglesham, D.J. ; Luftman, H.S. ; Unterwald, F.C. ; Boone, T. ; Thompson, M.O. ; Poate, J.M.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.177-186,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
9.

Conference Proceedings
Conference Proceedings
9. Influence of Flouring and BF2 Implants on the Transient Enhanced Diffusion of Boron
Vuong, H-H. ; Gossmann, H.-J. ; Rafferty, C.S. ; Luftman, H.S. ; Unterwald, F.C. ; Jacobson, D.C. ; Ahrens, R.E ; Boone, T. ; Zeitzoff, P.M.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.6-12,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5