1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF 300 mm SILICON POLISHED WAFERS
Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.641-659,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers
Ono, T. ; Rozgonyi, G.A. ; Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.125-134,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
3.

Conference Proceedings
Conference Proceedings
3. INVITED: THE IMPACT OF THE 300mm SCALE-UP ON IC FAB PROCESS, METROLOGY, AND AUTOMATION EQUIPMENT
Goodall, R.K.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1303-1324,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
4.

Conference Proceedings
Conference Proceedings
4. Silicon Wafer Thermal Processing: 300 mm Issues
Huff, H.R. ; Goodall, R.K. ; Griffiths, S.K. ; Nilson, R.H.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.135-182,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
5.

Conference Proceedings
Conference Proceedings
5. Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering
Huff, H.R. ; Goodall, R.K. ; Williams, E. ; Woo, K-S. ; Liu, B.Y.H. ; Warner, T. ; Hirleman, D. ; Gildersleeve, K. ; Bullis, W.M. ; Seheer, B.W. ; Stover, J.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.365-383,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5