1.

Conference Proceedings
Conference Proceedings
1. SOI materials for mainstream CMOS technology
Maszara, W.P. ; Dockerty, R. ; Gondran, C. ; Vasudev, P.K.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.15-26,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. Investigation of Hydrogen Permeation Doping Deactivation Caused by Oxide Etching
Reinhardt, K. ; Gondran, C. ; Marks, J. ; DiVincenzo, B. ; Awadelkarim, O. ; Fonash, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.343-352,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
3.

Conference Proceedings
Conference Proceedings
3. Contamination and degradation of 157-nm stepper optical components: field experience at International SEMATECH
Meute, J. ; Rich, G.K. ; Hien, S. ; Dean, K.R. ; Gondran, C. ; Cashmore, J.S. ; Ashworth, D. ; Webb, J.E. ; Rich, L.R. ; Dewa, P.G.
Pub. info.: Optical Microlithography XV.  Part One  pp.724-733,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691