1.

Conference Proceedings
Conference Proceedings
1. Development of a low-stress silicon-rich nitride film for micromachined sensor applications
Williams,M. ; Smith,J. ; Mark,J. ; Matamis,G. ; Gogoi,B.P.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.436-442,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Development of polysilicon films for MEMS intergration with submicron COMS process
McCarson,B.L. ; Yip,B. ; Reno,C. ; Gorrell,J. ; Gogoi,B.P.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.427-435,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
3.

Conference Proceedings
Conference Proceedings
3. Release etch modeling analysis and the use of laser scanning microscopy for etch time prediction of micromachined structures
Matamis,G. ; Gogoi,B.P. ; Monk,D.J. ; McNeil,A. ; Burrows,V.A.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.267-278,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
4.

Conference Proceedings
Conference Proceedings
4. Integration issues for pressure sensors
Gogoi,B.P. ; Monk,D.J. ; Maudie,T. ; Miller,T.F. ; Torres,J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.174-187,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
5.

Conference Proceedings
Conference Proceedings
5. Microfluidic flow control using selective hydrophobic patterning
Handique,K. ; Gogoi,B.P. ; Burke,D.T. ; Mastrangelo,C.H. ; Burns,M.A.
Pub. info.: Micromachined Devices and Components III.  pp.185-195,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224